Fuqi Load Port - Semiconductor front-end equipment installed in the front-end module EFEM

Load Port: Chinese name: Wafer Loading and Unloading Machine/Wafer Loading Machine, is a device system independently developed by Xiamen Fuqi Automation Equipment Co., Ltd. The Load Port is installed in front of the EFEM * (Equipment Front End Module) and used as a window for the wafer to enter and exit the EFEM; Intelligent and flexible factory interface modules for tool automation; Load Port (wafer loading and unloading machine/wafer loading machine) supports excellent reliability and ultra clean performance; Maximizing interoperability, seamless interchangeability, and ease of configuration; Load Port (wafer loading and unloading machine/wafer loading machine) is compatible with all manually or through AMHS vehicles delivered FOUP and automatic front open shipping boxes (FOSB) that meet SEMI requirements; Used to maintain the cleanliness of the wafer during transportation.

Xiamen Fuqi Automation Equipment Co., Ltd. has completed the design, assembly, and debugging of the Load Port wafer loading and unloading machine suitable for the Chinese market. We are composed of a technical team from top research institutes in Japan, China, and China, as well as experienced in semiconductor equipment manufacturing. Together, we are committed to independent research and development of key components that are monopolized by foreign countries to solve bottleneck problems. Fuqi Load Port loaders are all independent brands and technologies, breaking the awkward situation of assembling foreign core components with existing domestic equipment and truly filling the gap of domestic components.

The Load Port wafer loading and unloading equipment belongs to the semiconductor manufacturing equipment related equipment series, including process wafer conveying equipment and inter process wafer conveying equipment. It is a sub field of wafer manufacturing equipment and is currently mainly monopolized by Japanese and American equipment companies. Fuqi Automation has many years of experience in equipment manufacturing and has extensive experience in research and development, design, manufacturing, and maintenance of handling system equipment.

✱ Load Port has the following main characteristics:

1. Applicable Cassette Type: 8 "Cassette&12" 25 slot Wafer FOUP/FOSB SEMI E1.9/M31;

2. Mounting standard: SEMI E63;

3. Opener Type: SEMI E62/Front open;

4. Platform height standard (FOUP/FOSB Load Height): SEMI E1.5/E63;

5. Built in protrusion detection;

6. RFID automatic recognition;

7. Operation safety protection alarm;

8. Closed working environment;

The main configuration of the ✱ Load Port:

Platform transfer unit;

Automatic lid opening unit;

RFID reading unit;

Security protection system;

Motion control system;

Modular design.

Xiamen Fuqi Automation Equipment Co., Ltd. mainly engages in the implementation of automation solutions for LCD and semiconductor industries, as well as the research and manufacturing of visual and optical detection equipment. Its products cover Pre Aligner/wafer pre positioning system/wafer calibrator, Load Port/wafer loading and unloading machine/wafer loading and unloading machine, LCD, dispensing equipment, aging equipment, testing equipment, automatic loading and unloading equipment, semiconductor EFEM equipment, non-standard customized equipment, etc. The company was established in 2014 with a registered capital of 20 million yuan. The factory covers a total area of 3500 square meters, including a clean workshop of 1500 square meters, a processing center of 1000 square meters, and an office area of 1000 square meters. It is a national high-tech enterprise that integrates research and development, production, sales, and service.

Xiamen Municipal High tech Enterprise

National high-tech enterprise

FANUC Intelligent Robot Agent

Xiamen Fuqi Automation is customer-centric, adhering to the principles of customer satisfaction, excellent technology, and quality first. With professional technical advantages, it solves production process problems for customers. With excellent research and development, production capacity, high-speed response ability, and high-quality service, it has formed a good reputation and praise among customers. The company has a professional technical research and development team, accumulated years of equipment research results and rich experience in automation manufacturing. At present, our company has obtained 8 utility model patent certificates and 19 software copyrights through independent research and development.