Main Configuration of Load Port

Load Port: Chinese name: wafer loading and unloading machine/wafer loading machine. It is an intelligent automation equipment system independently developed by Xiamen Fuqi Automation Equipment Co., Ltd., which helps enterprises with handling and conveying operations.

The main configuration of the ✱ Load Port:

Platform transfer unit;

Automatic lid opening unit;

RFID reading unit;

Security protection system;

Motion control system;

Modular design.