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Clamp Edge Finder 【 wafer Pre Aligner (clamp version) 】

PRODUCTS > Semiconductor series > Clamp Edge Finder 【 wafer Pre Aligner (clamp version) 】

Clamp Edge Finder 【 wafer Pre Aligner (clamp version) 】

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Pre aligner: Chinese name: Edge Finder, wafer pre positioning system clamping plate, wafer calibrator. This device achieves high-precision and efficient pre positioning of the center and flat edges (notches) of 8-12 inch wafer wafers, serving the transportation and handling needs of wafer wafers. Our visual edge finder has a center accuracy of within 0.2mm, a Notch accuracy of ± 0.3 degrees, and a Flat accuracy of ± 0.3 degrees. It is suitable for crystal wafers with missing corners, flat edges, polygons, etc.

Main features:


1. Suitable for pre calibration of wafer position in semiconductor production equipment and testing equipment;


2. Non contact pre positioning wafer (edge clamping type)


3. Compatible with SEMI standard 200-300mm wafers and transparent wafers (with no hollow center);


4. Compatible with SEMI standard Notch;


5. Wafer thickness requirement:>500um;


6. Can locate the center and find the Mark (Flat Edge/Notch) logo;


8. Currently, wafers with hollowed out centers are not supported;


9. Serial port type RS232;


Main configuration:


Built in modular stepper motor, driver, and pulse generator


Serial port type: RS232


Modular design




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