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6-8-inch wafer edge inspection machine

PRODUCTS > Semiconductor series > 6-8-inch wafer edge inspection machine

6-8-inch wafer edge inspection machine

Inspection of wafer edge defects before cutting, suitable for 6inch~8inch wafers

Main functions:


1. Suitable for edge collapse and crack detection on wafers;


2. Compatible with 6-8 inch wafers;


3. It can automatically load and unload materials and read the Wafer ID;


4. Possess AI algorithms that can correctly recognize and output results;


5. Can perform edge collapse and crack detection on both sides;


6. Wafer Pre Aligner module;


7.6-8-inch wafer handling robot arm;


8. OCR module unit;


9. Motion control system;


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