Load Port

The Load Port is installed in front of the EFEM * (Equipment Front End Module) and serves as a window for wafers to enter and exit the EFEM; Intelligent and flexible factory interface modules for tool automation; Supporting excellent reliability and ultra clean performance; Maximizing interoperability, seamless interchangeability, and ease of configuration; Compatible with all FOUP and automatic front open shipping boxes (FOSB) delivered manually or through AMHS vehicles that comply with SEMI requirements; Used to maintain the cleanliness of the wafer during transportation.

Main features of ✱ Load Port

1. Applicable Cassette Type: 8 "Cassette&12" 25 slot Wafer FOUP/FOSB SEMI E1.9/M31;

2. Mounting standard: SEMI E63;

3. Opener Type: SEMI E62/Front open;

4. Platform height standard (FOUP/FOSB Load Height): SEMI E1.5/E63;

5. Built in protrusion detection;

6. RFID automatic recognition;

7. Operation safety protection alarm;

8. Closed working environment;

9. Support the semie84 protocol function;

Main Configuration of ✱ Load Port

Platform transfer unit;

Automatic lid opening unit;

RFID reading unit;

Security protection system;

Motion control system;

Modular design.