8-12Wafer inspection machine (before cutting)

Function Introduction

Fully automatic Wafer transfer, can be used for 12 inch wafers for PA, ID Reader, macroscopic inspection, microscopic inspection, loading and unloading of semiconductor production equipment, FOSB, FOUP exchange, etc

Specification parameters

Main configurations

Dual arm Wafer handling robot, non-contact Pre Aligner, Wafer ID Reader, high pixel metallographic microscope, XY fully automatic E-Mapping guidance detection