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Wafer Pre Aligner

PRODUCTS > Semiconductor series > Wafer Pre Aligner

Wafer Pre Aligner

    • 1
Pre aligner: Chinese name: wafer pre positioning system, wafer calibrator. This device achieves high-precision and efficient pre positioning of the center and flat edges (notches) of 4-12 inch wafer wafers, serving the transportation and handling needs of wafer wafers.

Main characteristics

1. Suitable for pre calibration of wafer position in semiconductor production equipment and testing equipment;

2. Non contact pre positioning wafer;

3. Compatible with SEMI standard 100-300mm wafers and transparent wafers (with no hollow center);

4. Compatible with SEMI standard Notch/Flat;

5. Compatible with transparent wafers (optional);

6. Can locate the center and find the Mark logo;

7. Reading position: 8-12 inches can read the engraving number on the back, and below 6 inches, only the engraving number on the front can be read;

8. Currently, wafers with hollowed out centers are not supported;

9. SEMI S2 certification


Main configuration

Laser sensor

Built in modular stepper motor, driver, and pulse generator

• Serial port type: USB serial port

Modular design


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