What is a Load Port?

Load Port: Chinese name: Wafer Loading and Unloading Machine/Wafer Loading Machine, is a device system independently developed by Xiamen Fuqi Automation Equipment Co., Ltd. The Load Port is installed in front of the EFEM * (Equipment Front End Module) and used as a window for the wafer to enter and exit the EFEM; Intelligent and flexible factory interface modules for tool automation; Load Port (wafer loading and unloading machine/wafer loading machine) supports excellent reliability and ultra clean performance; Maximizing interoperability, seamless interchangeability, and ease of configuration; Load Port (wafer loading and unloading machine/wafer loading machine) is compatible with all manually or through AMHS vehicles delivered FOUP and automatic front open shipping boxes (FOSB) that meet SEMI requirements; Used to maintain the cleanliness of the wafer during transportation.

✱ Load Port has the following main characteristics:

1. Applicable Cassette Type: 8 "Cassette&12" 25 slot Wafer FOUP/FOSB SEMI E1.9/M31;

2. Mounting standard: SEMI E63;

3. Opener Type: SEMI E62/Front open;

4. Platform height standard (FOUP/FOSB Load Height): SEMI E1.5/E63;

5. Built in protrusion detection;

6. RFID automatic recognition;

7. Operation safety protection alarm;

8. Closed working environment;

The main configuration of the ✱ Load Port:

Platform transfer unit;

Automatic lid opening unit;

RFID reading unit;

Security protection system;

Motion control system;

Modular design.

Xiamen Fuqi Automation Equipment Co., Ltd.'s Load Port (wafer loading and unloading machine/wafer loading machine) has its unique functional configuration and characteristics, which can well meet the needs of many factories in implementing interactive operations, and has a large market space.